Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) Book PDF, ePub eBook

Join our eBook service for unlimited books & audiobooks. Get a free 7 day subscription! ↓↓↓↓↓


Book Descriptions:

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

Key topics covered include:

• Silicon as MEMS material
• Material properties and measurement techniques
• Analytical methods used in materials characterization
• Modeling in MEMS
• Measuring MEMS
• Micromachining technologies in MEMS
• Encapsulation of MEMS components
• Emerging process technologies, including ALD and porous silicon

Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities.

• Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland.
• Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland.
• Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland.
• Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan.

• Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques
• Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs
• Discusses properties, preparation, and growth of silicon crystals and wafers
• Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)

From reader reviews:

Freida Gilbert:

Don't be worry if you are afraid that this book may filled the space in your house, you may have it in e-book method, more simple and reachable. That Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) can give you a lot of buddies because by you considering this one book you have point that they don't and make an individual more like an interesting person. This particular book can be one of one step for you to get success. This guide offer you information that probably your friend doesn't know, by knowing more than additional make you to be great people. So , why hesitate? We should have Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies).

Jess Cooke:

That publication can make you to feel relax. That book Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) was vibrant and of course has pictures on there. As we know that book Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) has many kinds or type. Start from kids until teens. For example Naruto or Investigator Conan you can read and think you are the character on there. Therefore not at all of book are usually make you bored, any it offers up you feel happy, fun and rest. Try to choose the best book for yourself and try to like reading this.

Victor Brown:

As a student exactly feel bored to be able to reading. If their teacher expected them to go to the library or even make summary for some e-book, they are complained. Just tiny students that has reading's internal or real their passion. They just do what the teacher want, like asked to go to the library. They go to right now there but nothing reading very seriously. Any students feel that studying is not important, boring as well as can't see colorful pictures on there. Yeah, it is to become complicated. Book is very important in your case. As we know that on this period of time, many ways to get whatever we wish. Likewise word says, ways to reach Chinese's country. So , this Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) can make you feel more interested to read.

Michael Gage:

Some individuals said that they feel fed up when they reading a e-book. They are directly felt the item when they get a half areas of the book. You can choose the particular book Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) to make your own reading is interesting. Your own skill of reading talent is developing when you such as reading. Try to choose easy book to make you enjoy to see it and mingle the sensation about book and reading especially. It is to be very first opinion for you to like to open a book and go through it. Beside that the guide Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) can to be your friend when you're truly feel alone and confuse with the information must you're doing of the time.